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Practical UV Excimer Laser Image System Illuminators

Authored by: Jeffrey P. Sercel , Michael von Dadelszen

Laser Beam Shaping Applications

Print publication date:  March  2017
Online publication date:  February  2017

Print ISBN: 9781498714419
eBook ISBN: 9781315371306
Adobe ISBN:

10.1201/9781315371306-5

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Abstract

The illumination section of an excimer laser system is central to its performance, harnessing the full potential of this powerful production tool’s strengths and capacity. This optical device serves to shape the beam, control its divergence, control the beam profile through the use of different homogenizers, and geometrically increase the efficiency of a process. 7 The techniques outlined herein are not merely theoretical; in fact, they have been proven and are continually being proven and optimized on a daily basis in production facilities around the world.

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